Vacuum Robot Grease

SEIVIOVaculub B042 Vacuum Robot GreaseYesMade of high-purity linear perfluoropolyether oil, nano-level ultra-finePTFE thickens. It is refined by adding special anti-corrosion additives. It is a special grease specially used for joints, bearings, and guide rails of robots in vacuum chambers (most commonly semiconductor wafer handling robots). It is an ultra-high vacuum and low outgassing grease. The core goal is to reduce friction and wear while preventing volatilization from contaminating the chamber, wafers, and optical components.

• After deep removal of small molecules, the total mass loss TML and condensable volatile matter CVCM are low;
• The formula is pure and will not easily produce tiny solid debris when the joints are repeatedly rotated, oscillated and sheared;
• Smooth operation for a long time, reducing friction, extending the life of the manipulator and reducing maintenance cycles;
• Low oil separation reduces base oil scattering, which can inhibit wafer contamination caused by base oil scattering;
• It has extremely high chemical stability and does not react with acids, alkalis and highly active substances.

It is suitable for semiconductor wafer vacuum manipulators (vacuum robots). It is used inside vacuum process chambers such as coating, etching, and ion implantation, and is responsible for grabbing and transporting wafers. It is also used in precision vacuum motion mechanisms such as vacuum coating equipment robots and manipulators in aerospace vacuum test cabins. Lubricating parts: robot rotating joints, harmonic bearings, crossed roller bearings, guide rails, and O-rings.

1kg/can Order number 381995

Store in a dry place.