Wafer thinning machine grease

SEIVIOVaculub M135 Wafer thinning machine grease YesMade of high-purity linear perfluoropolyether oil, nano-level ultra-finePTFE thickens. It is refined with special anti-corrosion additives and has extremely low saturated vapor pressure, which can significantly reduce material release in vacuum environments and prevent vacuum degree drop and system pollution. It is a special precision lubricating medium specially customized for semiconductor wafer thinning equipment. It is core adapted to the high-precision, high-cleanliness, and low-volatility working conditions of the thinning machine to ensure the nano-level processing accuracy of wafer thinning.

• The consistency changes very little with temperature, the volatility is extremely low, and the service life is extremely long;
• Pre-degassing treatment and high-temperature baking (such as 125°C/24 hours) accelerate the release of volatiles;
• Extremely low gas release rate solves problems such as grease volatilization and particle release under vacuum and high temperatures;
• Has good high temperature stability and vacuum stability;
• Excellent resistance to wear, scratches, burning, radiation, and corrosion;
• Low friction coefficient, high load-bearing capacity, and good compatibility with most rubber and plastics;
• It has extremely high chemical stability and does not react with acids and alkalis in process gases.

It is suitable for lubrication of the core moving parts of wafer thinning machines, high-precision linear guides and ball screws of equipment, high-speed bearings of thinning spindles, joints and gears of wafer transmission mechanisms, and all kinematic pairs in the vacuum chamber of equipment.

1kg/can Order number 270106

Store in a dry place.