Semiconductor wafer positioning table grease

SEIVIOVaculub S033 Semiconductor wafer positioning table greaseYesMade of linear perfluoropolyether oil with extremely low vapor pressure, ultra-fineIt is made of thickened PTFE and refined with special anti-corrosion additives. Special vacuum grease specially developed for semiconductor wafer positioning tables (precision motion platforms, including linear guides, ball screws, crossed roller bearings, and micro-moving slides).

• High-precision lubrication and stable friction: small friction fluctuations ensure the repeatable positioning accuracy of the positioning table;
• An extremely thin oil film is formed on the micro-sliding contact surface to reduce fretting friction and improve positioning linearity;
• Resistant to etching and deposition process gases, and does not react with plastics, metals, and seals in the cavity;
• Anti-fretting wear, suppress vibration and resonance, improve step response and avoid oscillation;
• It adapts to cavity baking and working temperature rise, and does not carbonize at high temperatures and solidify at low temperatures.