High-precision wafer alignment table grease

SEIVIOVaculub S033 High-precision wafer alignment table grease YesMade of linear perfluoropolyether oil with extremely low vapor pressure, ultra-fineIt is made by thickening PTFE and adding special anti-corrosion additives. It is specially used for the ball screws, linear guides, precision bearings, and tiny sliding pairs inside the workpiece table of the wafer alignment table. It is lubricated in a clean room or even a vacuum environment to ensure nano-level repeatable positioning accuracy without contaminating the wafer and optical lens.

• High-precision lubrication, stable friction, and small friction fluctuations ensure the repeatable positioning accuracy of the positioning table;
• An extremely thin oil film is formed on the micro-sliding contact surface to reduce fretting friction and improve positioning linearity;
• Ultra-low vapor pressure, chemical inertness, high temperature resistance, and extremely low vacuum outgassing;
• Anti-fretting wear, suppress vibration and resonance, improve step response and avoid oscillation;
• It adapts to cavity baking and working temperature rise, and does not carbonize at high temperatures and solidify at low temperatures.

It is suitable for core friction pairs such as crossed roller bearings, miniature precision screws, linear guides, and fine-tuning swing joints equipped with lithography machine wafer alignment tables. It is also compatible with similar precision moving parts of wafer inspection tables and wafer transfer EFEM equipment.

1kg/can Order number 252103

Store in a dry place.